Printable planar lightwave circuits with a high refractive index

We report a novel nanofabrication method to fabricate printable integrated circuits with a high refractive index working in the visible wavelength range. The printable planar ligthwave circuits are directly imprinted by ultra-violet nanoimprinting into functional TiO2-based resist on the top of planar waveguide core films. The printed photonic circuits are composed of several elementary components including ridge waveguides, light splitters and digital planar holograms. Multi-mode ridge waveguides with propagation losses around 40 dB cm−1 at 660 nm wavelength, and, on-chip demultiplexers operated in the visible range with 100 channels and a spectral channel spacing around 0.35 nm are successfully demonstrated.

[1]  Markku Kuittinen,et al.  Low-Loss Titanium Dioxide Strip Waveguides Fabricated by Atomic Layer Deposition , 2014, Journal of Lightwave Technology.

[2]  H. Cao,et al.  Compact spectrometer based on a disordered photonic chip , 2013, Nature Photonics.

[3]  G. Calafiore,et al.  A route for fabricating printable photonic devices with sub-10 nm resolution , 2013, Nanotechnology.

[4]  Eric Mazur,et al.  Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices. , 2012, Optics express.

[5]  M. Iwanaga.  Photonic metamaterials: a new class of materials for manipulating light waves , 2012, Science and technology of advanced materials.

[6]  S. Babin,et al.  Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications , 2012 .

[7]  Carlos Pina-Hernandez,et al.  Facile route of flexible wire grid polarizer fabrication by angled-evaporations of aluminum on two sidewalls of an imprinted nanograting , 2012, Nanotechnology.

[8]  C. Xiong,et al.  Low-loss, silicon integrated, aluminum nitride photonic circuits and their use for electro-optic signal processing. , 2012, Nano letters.

[9]  Eric Mazur,et al.  Mixed two- and three-photon absorption in bulk rutile (TiO2) around 800 nm. , 2012, Optics express.

[10]  Hong Yee Low,et al.  Direct patterning of TiO₂ using step-and-flash imprint lithography. , 2012, ACS nano.

[11]  K. Okamoto.  Progress and technical challenge for planar waveguide devices: silica and silicon waveguides , 2012 .

[12]  Eric Mazur,et al.  Integrated TiO2 resonators for visible photonics. , 2011, Optics letters.

[13]  A. Polman,et al.  Improved performance of polarization-stable VCSELs by monolithic sub-wavelength gratings produced by soft nano-imprint lithography , 2011, Nanotechnology.

[14]  Xiaogan Liang,et al.  Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting , 2011 .

[15]  Hiroshi Takahashi,et al.  High performance planar lightwave circuit devices for large capacity transmission , 2011, 2011 37th European Conference and Exhibition on Optical Communication.

[16]  Adam L. Washburn,et al.  Photonics-on-a-chip: recent advances in integrated waveguides as enabling detection elements for real-world, lab-on-a-chip biosensing applications. , 2011, The Analyst.

[17]  Sarah Kim,et al.  Photo-induced hybrid nanopatterning of titanium dioxide via direct imprint lithography , 2010 .

[18]  A. Politi,et al.  Shor’s Quantum Factoring Algorithm on a Photonic Chip , 2009, Science.

[19]  Stefano Cabrini,et al.  Digital optical spectrometer-on-chip , 2009 .

[20]  Steven Abbott,et al.  Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting , 2009 .

[21]  Karen Willcox,et al.  Kinetics and kinematics for translational motions in microgravity during parabolic flight. , 2009, Aviation, space, and environmental medicine.

[22]  A. Politi,et al.  Manipulation of multiphoton entanglement in waveguide quantum circuits , 2009, 0911.1257.

[23]  Peng Jiang,et al.  Bioinspired Self‐Cleaning Antireflection Coatings , 2008 .

[24]  S. Chou,et al.  Nanogap detector inside nanofluidic channel for fast real-time label-free DNA analysis. , 2008, Nano letters.

[25]  E. Kumacheva,et al.  Patterning surfaces with functional polymers. , 2008, Nature materials.

[26]  C. Chen,et al.  Stabilization of Lateral Mode Transients in High-Power Broad Area Semiconductor Lasers , 2007, LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings.

[27]  Christophe Peroz,et al.  Glass nanostructures fabricated by soft thermal nanoimprint , 2007 .

[28]  Hailin Xue,et al.  TiO2 based metal-semiconductor-metal ultraviolet photodetectors , 2007 .

[29]  Yunfei Xue,et al.  Strength-improved Zr-based metallic glass/porous tungsten phase composite by hydrostatic extrusion , 2007 .

[30]  L. J. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[31]  L. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[32]  Tieh-Chi Chu,et al.  Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure , 2006 .

[33]  S. H. Kim,et al.  Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography , 2005 .

[34]  Design of Polarization-independent Wavelength Splitter based on Single Directional Coupler , 2005 .

[35]  John A. Rogers,et al.  Polymer Imprint Lithography with Molecular-Scale Resolution , 2004 .

[36]  Feng Hua,et al.  Ultrathin cantilevers based on polymer-ceramic nanocomposite assembled through layer-by-layer adsorption , 2004 .

[37]  Jian Wang,et al.  Large area direct nanoimprinting of SiO2–TiO2 gel gratings for optical applications , 2003 .

[38]  Chung-Yen Chao,et al.  Polymer microring resonators fabricated by nanoimprint technique , 2002 .

[39]  S. Chou,et al.  Imprint Lithography with 25-Nanometer Resolution , 1996, Science.

[40]  Junji Yamauchi,et al.  Beam-propagation analysis of bent step-index slab waveguides , 1990 .