Dynamic quality-process model in consideration of equipment degradation

Abstract In many manufacturing processes, equipment reliability plays a crucial role for product quality assurance. It is important to consider the effect of equipment degradation for the quality-process model. In this article, we propose a dynamic quality-process model to characterize the varying effects of a process to product quality due to equipment degradation. The proposed model considers the effects of process variables on product quality as piecewise linear functions with respect to the equipment degradation. It can automatically estimate the dynamic effects via a meaningful parameter regularization, leading to accurate parameter estimation and model prediction. The merits of the proposed method are illustrated by both simulations and a real case study in a crystal growth manufacturing process.

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