Device Robust-design by Using the Response Surface Methodology

Device robust-design is inherently a multiple-objective optimization problem. Using design of experiments (DoE) combined with response surface methodology (RSM) can satisfy the great incentive to reduce the number of TCAD simulations that need to be performed. However, the errors of RSM models may large enough to diminish the validity of the results for some nonlinear problems. To find the feasible design space, a new method with objectives-oriented design in generations that taking the errors of RSM model into account is presented. After the augment design of experiments in promising space according to the results of RSM model in current generation, the feasible space will be emerging as the model errors deceasing. The results on FIBMOS examples show that the methodology is efficiently.

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